Publications

Search Bibliography
Filter by: Year
select
Author
select
Title Keyword
select
Total result(s) found: 3
  • A. Amassian, R. Vernhes, J. E. Klemberg-Sapieha, P. Desjardins, L. Martinu, “Interface engineering during plasma-enhanced chemical vapor deposition of porous/dense SiN1.3 optical multilayers” Thin Solid Films 469-470 (2004) 47.
Keywords:
Optical coatings; Plasma processing and deposition; Silicon nitride; Ellipsometry
  • A. Amassian, P. Desjardins, L. Martinu, “Study of TiO2 film growth mechanisms in low-pressure plasma by in situ real-time spectroscopic ellipsometry” Thin Solid Films 447-448 (2004) 40.
Keywords:
Optical coatings; Plasma-enhanced chemical vapor deposition; In situ ellipsometry; Titanium dioxide
  • P. Jedrzejowski, J. Cizek, A. Amassian, J. E. Klemberg-Sapieha, J. Vlcek, L. Martinu, “Mechanical and optical properties of hard SiCN coatings prepared by PECVD” Thin Solid Films 447-448 (2004) 201.
Keywords:
PECVD; SiCN; Mechanical properties; Spectroscopic ellipsometry; Microstructure