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Total result(s) found: 1
  • A. Amassian, K. Kaminska, M. Suzuki, L. Martinu, K. Robbie, “Onset of shadowing-dominated mound growth in glancing angle deposition” Appl. Phys. Lett. 91 (2007) 173114. (Also featured in the November 2007 issue of the Virtual Journal of Nanoscale Science and Technology).
Keywords:
amorphous semiconductors, chemical vapour deposition, elemental semiconductors, nucleation, porosity, semiconductor growth, semiconductor thin films, silicon, surface morphology